Work

A Polysilicon Microhemispherical Resonating Gyroscope

Year: 2014

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2014.2327107

Authors: Peng Shao, Curtis L. Mayberry, Xin Gao, Vahid Tavassoli, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2134677387

FWCI: 3.008

Cites: 13

Cited by: 52

Related to: 10