Work

Microball bearing technology for MEMS devices and integrated microsystems

Year: 2011

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2011.5969887

Authors: R. Ghodssi, B. Hanrahan, M. Beyaz

Institutions: University of Maryland, College Park, DEVCOM Army Research Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2134766426

FWCI: 2.606

Cites: 12

Cited by: 10

Related to: 10