Work

Novel Temperature Compensation Scheme Formicroresonators Based on Controlled Stiffnessmodulation

Year: 2007

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2007.4300668

Authors: Jae Hyeong Seo, Kemal Safak Demirci, Albert Byun, Stuart Truax, Oliver Brand

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Georgia Institute of Technology

OpenAlex ID: W2135575575

FWCI:

Cites: 5

Cited by: 1

Related to: 10