Work

Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory

Year: 2003

Type: article

Source: Journal of Adhesion Science and Technology

DOI: 10.1163/15685610360554384

Author: K. Komvopoulos

Institution: University of California, Berkeley

Language: English

Topic: Adhesion, Friction, and Surface Interactions

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2135658063

FWCI: 18.96

Cites: 42

Cited by: 202

Related to: 10