Micromachining for optical and optoelectronic systems
Year: 1997
Type: article
Source: Proceedings of the IEEE
DOI: 10.1109/5.649660
Author: M.C. Wu
Institution: University of California, Los Angeles
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2136305965