Work

Piezoelectric microspeaker with compressive nitride diaphragm

Year: 2003

Type: conference-paper

DOI: 10.1109/memsys.2002.984252

Authors: Seung Hwan Yi, Eun Sok Kim

Institutions: University of Hawaiʻi at Mānoa, University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2136492873

FWCI: 2.594

Cites: 8

Cited by: 25

Related to: 10