Work

Micromechanical IBARs: Modeling and Process Compensation

Year: 2010

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2009.2030076

Authors: Gavin K Ho, John Kangchun Perng, Farrokh Ayazi

Institutions: Analog Devices (United States), Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Analog Devices, Georgia Institute of Technology

OpenAlex ID: W2136923581

FWCI: 1.513

Cites: 21

Cited by: 16

Related to: 10