Work

Fundamental leak calibration system for gas leaks with a defined pressure difference over the leak element

Year: 1996

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.579936

Authors: U. Wälchli, A. L. Stöckli, F. Rapp, M. A. Bösch, A. Schmid

Institution: Oerlikon (Liechtenstein)

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2137075571

FWCI:

Cites:

Cited by: 16

Related to: 10