Work

Laterally-excited silicon bulk acoustic resonators with sidewall AlN

Year: 2011

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2011.5969689

Authors: R. Tabrizian, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2137644351

FWCI: 1.353

Cites: 8

Cited by: 9

Related to: 10