Step and flash imprint lithography: Template surface treatment and defect analysis
Year: 2000
Type: article
DOI: 10.1116/1.1324618
Authors: T. Bailey, B. J. Choi, M. Colburn, M. Meissl, S. Shaya, J. G. Ekerdt, S. V. Sreenivasan, C. G. Willson
Institutions: Texas Materials Institute, The University of Texas at Austin
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2138368127