Work

Simple formulas for two- and three-dimensional capacitances

Year: 1983

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/t-ed.1983.21093

Authors: T. Sakurai, K. Tamaru

Institution: Toshiba (Japan)

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2139002947

FWCI: 3.181

Cites: 7

Cited by: 459

Related to: 10