Work

High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

Year: 2014

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2014.2333743

Authors: Jenna L. Fu, Farrokh Ayazi

Institutions: Georgia Institute of Technology, System Planning Corporation (United States)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2139085683

FWCI: 0.346

Cites: 23

Cited by: 12

Related to: 10