Work

ZNO-on-nanocrystalline diamond lateral bulk acoustic resonators

Year: 2007

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2007.4433131

Authors: Reza Abdolvand, Gavin K. Ho, James Butler, Farrokh Ayazi

Institutions: Georgia Institute of Technology, United States Naval Research Laboratory

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Georgia Institute of Technology

OpenAlex ID: W2140440089

FWCI: 6.888

Cites: 8

Cited by: 34

Related to: 10