Work

Plasma-Assisted CD Shrink and Overlay Metrology Techniques for Double Patterning ISSM Paper: PE-O-167

Year: 2007

Type: article

Authors: Reza Sadjadi, Helen Zhu, Peter Cirigliano, Elizabeth G. Pavel, Amulya Athayde, Cornel Bozdog, Michael Sendler, Danny Mor

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2140942945

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