Work

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

Year: 2008

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2008.07.014

Authors: G.C.A.M. Janssen, M.M. Abdalla, F. van Keulen, B.R. Pujada, B. van Venrooy

Institutions: Delft University of Technology, Materials innovation institute, Netherlands Organisation for Applied Scientific Research

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2141808559

FWCI: 21.12

Cites: 33

Cited by: 734

Related to: 10