Work

Comparison of defect size distributions based on electrical and optical measurement procedures

Year: 2002

Type: conference-paper

Source: ASMC proceedings

DOI: 10.1109/asmc.1997.630748

Authors: C. Hess, L.H. Weiland

Institution: Karlsruhe Institute of Technology

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2142671894

FWCI: 0.711

Cites: 14

Cited by: 5

Related to: 10