Year: 1997
Type: article
Abstract: The distributions of the potential and charge density in a capacitive angular-position sensor with three electrode disks in an axis-symmetrical configuration have been found by creating a suitable physical model and solving Laplace's equation. The influences of geometrical parameters on the nonlinearity, which originates from the electric-field-bending effect, are discussed in detail for a capacitive angular-position sensor. The approximately analytical results are verified by a numerical analysis and are found to be very useful to predict the influences of geometrical nonidealities. The calculations are experimentally verified by using a novel, absolute angular-position sensor with a nonlinearity of less than /spl plusmn/17" and /spl plusmn/50" over measurement ranges of 15/spl deg/ and 90/spl deg/, respectively.
DOI: 10.1109/19.552149
Authors: Xiujun Li, G. de Jong, G.C.M. Meijer
Institution: Delft University of Technology
Language: English
Subfield: Computer Networks and Communications
Field: Computer Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2143266266