Work

Nanoscale Impedance Microscopy—A Characterization Tool for Nanoelectronic Devices and Circuits

Year: 2005

Type: article

Source: IEEE Transactions on Nanotechnology

DOI: 10.1109/tnano.2004.837856

Authors: L.S.C. Pingree, E.F. Martin, K.R. Shull, M.C. Hersam

Institutions: Northwestern University, Intel (United States)

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funders: Northwestern University, Argonne National Laboratory

OpenAlex ID: W2143596885

FWCI: 1.225

Cites: 22

Cited by: 24

Related to: 10