Work

Indium phosphide MEMS for integrated bio-sensing

Year: 2006

Type: conference-paper

Source: International Semiconductor Device Research Symposium

DOI: 10.1109/isdrs.2005.1596086

Authors: N. Siwak, M.W. Pruessner, J. McGee, R. Ghodssi

Institutions: University of Maryland, College Park, United States Naval Research Laboratory, Naval Research Laboratory Optical Sciences Division

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2143626974

FWCI: 0.53

Cites: 5

Cited by: 2

Related to: 10