Work

Large area molded silicon nitride micro mirrors

Year: 2003

Type: article

Source: IEEE Photonics Technology Letters

DOI: 10.1109/lpt.2003.818046

Authors: B.J. Lutzenberger, D.L. Dickensheets, T.J. Kaiser

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2144315519

FWCI: 0.669

Cites: 7

Cited by: 5

Related to: 10