Work

Dual-mode vertical membrane resonant pressure sensor

Year: 2014

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2014.6765588

Authors: Roozbeh Tabrizian, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2144456343

FWCI: 2.588

Cites: 9

Cited by: 16

Related to: 10