Work

Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonators

Year: 2003

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2002.984263

Authors: D. Lange, C. Hagleitner, C. Herzog, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2144463430

FWCI: 3.026

Cites: 6

Cited by: 11

Related to: 10