Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution
Year: 1991
Type: article
Source: Journal of Materials Chemistry
DOI: 10.1039/jm9910101045
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2145442192