Work

Metrology of 3D IC with X-ray Microscopy and nano-scale X-ray CT

Year: 2009

Type: conference-paper

Source: IEEE International Interconnect Technology Conference (IITC)

DOI: 10.1109/iitc.2009.5090362

Authors: Steve Wang, Jeff Gelb, S. H. Lau, Wenbing Yun

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2147079648

FWCI: 0.895

Cites: 4

Cited by: 4

Related to: 10