Bulk micromachining of silicon
Year: 1998
Type: article
Source: Proceedings of the IEEE
DOI: 10.1109/5.704259
Authors: G.T.A. Kovacs, N.I. Maluf, K.E. Petersen
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2147142329