Work

Ultrasound-transducer using membrane resonators realized with bipolar IC technology

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1994.555594

Authors: O. Brand, H. Baltes, U. Baldenweg

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2147873898

FWCI: 2.845

Cites: 8

Cited by: 22

Related to: 10