A high-Q in-plane SOI tuning fork gyroscope
Year: 2006
Type: conference-paper
Authors: A. Sharma, F.M. Zaman, B.V. Amini, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2148094831