Work

Vertically-Shaped Tunable MEMS Resonators

Year: 2008

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2007.910251

Authors: B. Morgan, R. Ghodssi

Institutions: DEVCOM Army Research Laboratory, University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Army Research Laboratory

OpenAlex ID: W2148815348

FWCI: 2.091

Cites: 22

Cited by: 32

Related to: 10