Work

Cantilever-based resonant microsensors with integrated temperature modulation for transient chemical analysis

Year: 2015

Type: conference-paper

Abstract: This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2015.7181223

Authors: C. Carron, P. Getz, S. M. Heinrich, F. Josse, O. Brand

Institutions: Georgia Institute of Technology, Marquette University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Science Foundation, Georgia Institute of Technology, Division of Electrical, Communications and Cyber Systems

Awards: Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing, Collaborative Research: Micromachined In-Plane Resonator Arrays with Integrated Temperature Modulation: A Systems Approach to Liquid-Phase Chemical Sensing