A probe with ultrathin film deflection sensor for scanning probe microscopy and material characterization
Year: 2011
Type: article
Source: Sensors and Actuators A Physical
Authors: Angelo Gaitas, Tao Li, Weibin Zhu
Institutions: PicoCal (United States), Delft University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2149096403