Modeling of real defect outlines and parameter extraction using a checkerboard test structure to localize defects
Year: 1994
Type: article
DOI: 10.1109/66.311331
Authors: C. Hess, A.P. Stroele
Institution: Karlsruhe Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2149105077