Work

Silicon - Post Processing CMOS Wafers to Create Integrated Sensors, Mems and Electro-Optic Systems

Year: 2010

Type: article

Source: SAIEE Africa Research Journal

DOI: 10.23919/saiee.2010.8532213

Authors: A.J. Walton, J.T.M. Stevenson, I. Underwood, J.G. Terry, S. Smith, W. Parkes, C. Dunare, H. Lin, Y. Li, R. Henderson, D. Renshaw, B. Rae, K. Muir, M. Desmulliez, D. Flynn, M.J. MacIntosh, W.S. Holland, A. F. Murray, T.B. Tang, A. Bunting

Institutions: University of Edinburgh, Heriot-Watt University, Royal Observatory, UK Astronomy Technology Centre

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2149341557

FWCI: 0.504

Cites: 33

Cited by: 3

Related to: 10