Micromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics
Year: 1999
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-574-213
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Department of Energy
OpenAlex ID: W2149823471
