A low cost wafer-level MEMS packaging technology
Year: 2005
Type: conference-paper
Authors: P. Monaiemi, P.J. Joseph, P.A. Kohl, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2149881015