Work

A new MEMS wafer probe card

Year: 1997

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1997.581868

Authors: Yanwei Zhang, Yongxia Zhang, D. Worsham, D. Morrow, R.B. Marcus

Institution: New Jersey Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Nanjing Institute of Technology

OpenAlex ID: W2151017616

FWCI: 3.846

Cites: 7

Cited by: 25

Related to: 10