Work

Linear motion microactuators using piezoelectric thin films

Year: 2002

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.1991.148798

Authors: W.P. Robbins, D.L. Polla, T. Tamagawa, D.E. Glumac, J.W. Judy

Institution: University of Minnesota

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2151055254

FWCI: 0.711

Cites: 6

Cited by: 11

Related to: 10