Work

Magnetic Microactuation Of Torsional Polysilicon Structures

Year: 2005

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.1995.717186

Authors: J.W. Judy, R.S. Muller

Institution: University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: British Society for Antimicrobial Chemotherapy

OpenAlex ID: W2151109552

FWCI: 3.299

Cites: 12

Cited by: 28

Related to: 10