Work

Nanolithography Using Hierarchically Assembled Nanowire Masks

Year: 2003

Type: article

Source: Nano Letters

DOI: 10.1021/nl034268a

Authors: Dongmok Whang, Song Jin, Charles M. Lieber

Institution: Harvard University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2151612258

FWCI: 11.07

Cites: 13

Cited by: 161

Related to: 10