Work

Micromachined acoustic Fabry-Perot system for distance measurement

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1998.659833

Authors: M. Hornung, O. Brand, O. Paul, H. Baltes, C. Kuratli, Q. Huang

Institutions: ETH Zurich, Integrated Systems Laboratory

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2152001481

FWCI:

Cites: 5

Cited by: 6

Related to: 10