Work

Model for ion-assisted thin-film densification

Year: 1986

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.336960

Author: Karl-Heinz Müller

Institution: Commonwealth Scientific and Industrial Research Organisation

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2152156750

FWCI: 19.98

Cites: 15

Cited by: 191

Related to: 10