Work

Characterization and Control of Molecular Contaminants on Oxide Nanoparticles and in Ultra High Purity Gas Delivery Systems for Semiconductor Manufacturing

Year: 2013

Type: dissertation

Source: UA Campus Repository (The University of Arizona)

Author: Hao Wang

Language: English

Topic: Adsorption, diffusion, and thermodynamic properties of materials

Subfield: Physical and Theoretical Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2152252696

Cites: 122

Cited by:

Related to: 10