Work

Acoustically coupled thickness-mode AIN-on-Si band-pass filters-Part II: simulation and analysis

Year: 2012

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2012.2452

Authors: V. A. Thakar, W. Pan, F. Ayazi, M. Rais-Zadeh

Institutions: University of Michigan, Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2153205532

FWCI: 1.457

Cites: 18

Cited by: 14

Related to: 10