Work

Process Parameters Optimization: A Design Study for TiO $_{2}$ Thin Film of Vacuum Sputtering Process

Year: 2009

Type: article

Source: IEEE Transactions on Automation Science and Engineering

DOI: 10.1109/tase.2009.2023673

Authors: Wen-Hsien Ho, Jinn-Tsong Tsai, Gong-Ming Hsu, Jyh-Horng Chou

Institutions: Kaohsiung Medical University, National Pingtung University, Metal Industries Research & Development Centre, National Kaohsiung First University of Science and Technology

Language: English

Topic: Optimal Experimental Design Methods

Subfield: Management Science and Operations Research

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2153334892

FWCI: 2.257

Cites: 20

Cited by: 30

Related to: 10