Work

Influence of non-ideal clamping in microcantilever resonant frequency estimation

Year: 2011

Type: conference-paper

Abstract: Among the most promising sensing platforms are resonating microcantilevers due to their high sensitivity and wide application range. A key parameter of the device implementation is the predicted value of the resonant frequency that depends on the modeling and considerations of relevant physical phenomena. In fact, the estimation based on the conventional, perfectly clamped, Bernoulli-Euler cantilever beam does not lead to satisfactory accuracy in certain cases. Hence this work investigates two system characteristics that may affect the re sonant frequency (a support effect and a so-called rim effect) and provides solutions for a straightforward estimation of rim dimension using resonance behavior of the cantilevers.

Source: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

DOI: 10.1109/fcs.2011.5977310

Authors: L. Fadel-Taris, C. Ayela, I. Dufour, D. Saya, F. Josse, S. M. Heinrich, O. Brand

Institutions: Centre National de la Recherche Scientifique, Laboratoire de l'Intégration du Matériau au Système, Université Bordeaux-I, Marquette University, Laboratoire d'Analyse et d'Architecture des Systèmes, Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2153344154

FWCI: 0.434

Cites: 3

Cited by: 4

Related to: 10