Work

Deposition of silicon carbide using the chemical vapor composites process: Process characterization and comparison with RASSPVDN model predictions

Year: 1993

Type: article

Source: Journal of materials research/Pratt's guide to venture capital sources

DOI: 10.1557/jmr.1993.1651

Authors: M.D. Allendorf, R.H. Hurt, N. Yang, P. Reagan, M. Robbins

Institutions: Sandia National Laboratories California, Sandia National Laboratories

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2154497211

FWCI: 1.978

Cites: 12

Cited by: 10

Related to: 10