A Gap Reduction and Manufacturing Technique for Thick Oxide Mask Layers With Multiple-Size Sub- $mu$ m Openings
Year: 2006
Type: article
Authors: R. Abdolvand, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2154617735