Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers
Year: 2006
Type: article
Authors: Y.S. Suzuki, Y.-C. Tai
Institutions: The University of Tokyo, California Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2154889720