Work

Temperature compensation of silicon micromechanical resonators via degenerate doping

Year: 2009

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.2009.5424221

Authors: Ashwin K. Samarao, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2154956263

FWCI: 19.45

Cites: 14

Cited by: 79

Related to: 10