Work

Architecture for Integrated Mems Resonators Quality Factor Measurement

Year: 2008

Type: preprint

Abstract: In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).

Source: arXiv (Cornell University)

DOI: 10.48550/arxiv.0802.3767

Authors: Mathias, H., Parrain, F., Gilles, J. -P., Megherbi, S., Zhang, M., Coste, Ph., Dupret, A.

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2155197681

Cites: 3

Cited by: 6

Related to: 10