Work

Thin-film gated photocathodes for electron-beam lithography

Year: 1999

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.591072

Authors: Z. Pei, J. McCarthy, C. N. Berglund, T. P. H. Chang, M. Mankos, K. Y. Lee, M. L. Yu

Language: English

Topic: Photocathodes and Microchannel Plates

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2155918557

FWCI: 1.425

Cites: 4

Cited by: 7

Related to: 10